论文标题
光子集成电路的MEMS
MEMS for Photonic Integrated Circuits
论文作者
论文摘要
审查了光子综合电路（PICS）的微电力系统（MEMS）领域。该场在纳米表上利用力学将机械师提高到千分尺尺度，以改善现有组件并引入图片中的新功能。这篇综述涵盖了综合光子学的MEMS致动原理和机械调整机制。在现有PIC技术平台中，对图片中MEMS可调组成部分的艺术状态进行了定量审查和严格评估。 MEMS提供了一种有力的方法来克服PIC技术中的当前局限性，并启用具有广泛应用的新设计维度。
The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.
