论文标题
SB2S3膜的脉冲激光沉积，用于相变可调纳米光子学
Pulsed laser deposition of Sb2S3 films for phase-change tunable nanophotonics
论文作者
论文摘要
具有较大光学对比度的非挥发相变材料对于将来的可调纳米光子学至关重要。 Trisulfide（SB2S3）由于可见光谱区域的吸收率低，最近在该领域广受欢迎。尽管文献中已经报道了几种SB2S3沉积技术，但在相变的最低吸收和最大的光学对比度方面都没有对它们进行优化。在这里，我们提出了SB2S3脉冲激光沉积的全面多参数优化。我们将特定的沉积和退火参数与所得的光学特性相关联，并提出的组合导致具有非凡品质的膜（Δn= 1.2在633 nm时）。最后，我们确定与折射率最大变化相关的晶体方向和振动模式，并将它们作为SB2S3开关对比度的有用指标。
Non-volatile phase-change materials with large optical contrast are essential for future tunable nanophotonics. Antimony trisulfide (Sb2S3) has recently gained popularity in this field due to its low absorption in the visible spectral region. Although several Sb2S3 deposition techniques have been reported in the literature, none of them was optimized with respect to the lowest possible absorption and largest optical contrast upon the phase change. Here, we present a comprehensive multi-parameter optimization of pulsed laser deposition of Sb2S3 towards this end. We correlate the specific deposition and annealing parameters with the resulting optical properties and propose the combination leading to films with extraordinary qualities (Δn = 1.2 at 633 nm). Finally, we identify crystal orientations and vibrational modes associated with the largest change in the refractive index and propose them as useful indicators of the Sb2S3 switching contrast.
