论文标题
薄膜和表面制备室的低能量万光光谱仪
Thin film and surface preparation chamber for the low energy muons spectrometer
论文作者
论文摘要
我们已经设计并构建了一个薄膜准备室，其基本压力为$ <2 \ times 10^{ - 9} $ 〜MBAR。目前，该腔室配备了两个大面积蒸发器（一个分子蒸发器和一个电子束蒸发器），一个离子溅射枪，一个厚度显示器和一个基板加热器。 It is designed such that it can handle large area thin film samples with a future possibility to transfer them in vacuum directly to the low energy muons (LEM) spectrometer or to other advanced characterization facilities in the Quantum Matter and Materials Center (QMMC) which will be constructed in 2024. Initial commissioning of the chamber resulted in high quality, large area and uniform molecular films of CuPc and TbPc$_2$ on various substrate materials.我们介绍了这些电影对低能$ $ $ $ $ $ SR（LE- $ $ $ SR）测量的首次结果。
We have designed and constructed a thin film preparation chamber with base pressure of $<2 \times 10^{-9}$~mbar. Currently, the chamber is equipped with two large area evaporators (a molecular evaporator and an electron-beam evaporator), an ion sputtering gun, a thickness monitor and a substrate heater. It is designed such that it can handle large area thin film samples with a future possibility to transfer them in vacuum directly to the low energy muons (LEM) spectrometer or to other advanced characterization facilities in the Quantum Matter and Materials Center (QMMC) which will be constructed in 2024. Initial commissioning of the chamber resulted in high quality, large area and uniform molecular films of CuPc and TbPc$_2$ on various substrate materials. We present first results from low energy $μ$SR (LE-$μ$SR) measurements on these films.
