论文标题
平面射频磁铁等离子体中的电子动力学:I。大厅加热和μ模式的机理
Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode
论文作者
论文摘要
在低压下,电子动力学和射频驱动,磁性增强的电容耦合等离子体(MECCP)中功率吸收的机制进行了研究。焦点的设备是几何不对称的圆柱磁子,其轴向方向径向不均匀的磁场和径向沿径向方向的电场。使用冷等离子体模型和单粒子形式主义对动力学进行分析研究,并使用内部能量和电荷来保存粒子中的粒子/蒙特卡洛碰撞代码eccopic1s-m。发现动力学与未磁性参考放电的动力学明显不同。在动力电极前的磁化区域中,在鞘膨胀期间出现了增强的电场,在鞘塌陷期间有反向电场。需要两个磁场以确保将电子传输的排出与磁场的限制效应。相应的方位角EXB-Drift可以将电子加速到非弹性能量范围内,从而导致RF功率耗散的新机制。它与霍尔电流有关,本质上与欧姆的加热不同,欧姆的加热已在以前的文献中被分类。预计新的加热在许多磁化的电容耦合放电中会占主导地位。提议将其称为“μ模式”,以将其与其他加热模式分开。
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investigated. The device in focus is a geometrically asymmetric cylindrical magnetron with a radially nonuniform magnetic field in axial direction and an electric field in radial direction. The dynamics is studied analytically using the cold plasma model and a single-particle formalism, and numerically with the inhouse energy and charge conserving particle-in-cell/Monte Carlo collisions code ECCOPIC1S-M. It is found that the dynamics differs significantly from that of an unmagnetized reference discharge. In the magnetized region in front of the powered electrode, an enhanced electric field arises during sheath expansion and a reversed electric field during sheath collapse. Both fields are needed to ensure discharge sustaining electron transport against the confining effect of the magnetic field. The corresponding azimuthal ExB-drift can accelerate electrons into the inelastic energy range which gives rise to a new mechanism of RF power dissipation. It is related to the Hall current and is different in nature from Ohmic heating, as which it has been classified in previous literature. The new heating is expected to be dominant in many magnetized capacitively coupled discharges. It is proposed to term it the "μ-mode" to separate it from other heating modes.