论文标题
独特的铁电疲劳行为和AL0.93B0.07N胶片中的特殊高温保留率
Unique Ferroelectric Fatigue Behavior and Exceptional High Temperature Retention in Al0.93B0.07N Films
论文作者
论文摘要
本文报告了AL1-XBXN薄膜的疲劳和保留行为,这是新型Wurtzite铁电元家族的成员,重点是电容器架构的作用。通过修改电容器结构,从而改变热和电边界条件,我们就可以洞悉固有和外在贡献者对降解趋势的相对重要性。我们的实验表明,金属(pt/w)/al0.93b0.07n/w/al2o3胶片的双极循环首先引起唤醒,然后是恒定可切换极化的区域。在额外的循环中,膜泄漏电流增加,然后膜发生了介电故障。对于不公平的第一代AL0.93B0.07N膜,具有100 nm厚的Pt PT电极存活〜104个双极循环,而1000 nm W顶部电极的膜在热介电衰减之前生存了〜10^5循环。 Sentaurus建模用于设计SU8场板,该板将性能提高到〜10^6疲劳周期。发现疲劳期间的热失败不是由于表面闪存事件引起的,而是与介电中的严重分解事件有关。这些电影显示出储存的极化状态的出色保留率。正如预期的那样,在相反状态(OS)测量值中,数据保留略有下降。但是,注意到即使在3.6x10^6秒(1000小时)之后。在200°C时,OS信号边缘仍然超过200 UC/CM2。在200oC烘烤10年后,预测的OS保留率为82%。
This paper reports the fatigue and retention behavior for Al1-xBxN thin films, a member of the novel family of wurtzite ferroelectrics, with an emphasis on the role of capacitor architecture. By modifying the capacitor architecture, and thus thermal and electrical boundary conditions, we create insight regarding the relative importance of intrinsic and extrinsic contributors to the degradation tendencies. Our experiments suggest that bipolar cycling of metal (Pt/W)/Al0.93B0.07N/W/Al2O3 film stacks first induced wake-up, then a region of constant switchable polarization. On additional cycling, the film leakage current increased, and then films underwent dielectric breakdown. For unpatterned first generation Al0.93B0.07N films with 100 nm thick Pt top electrodes survive ~104 bipolar cycles, whereas films with 1000 nm W top electrodes survive ~10^5 cycles before thermal dielectric breakdown. Sentaurus modeling was used to design an SU8 field plate which improved the performance to ~10^6 fatigue cycles. It was found that the thermal failures during fatigue were not due to surface flashover events but were associated with hard breakdown events in the dielectric. The films showed excellent retention of the stored polarization state. As expected, data retention was slightly inferior in the opposite state (OS) measurements. However, it is noted that even after 3.6x10^6 sec (1000 hr). at 200°C, the OS signal margin still exceeded 200 uC/cm2. The predicted OS retention is 82% after 10 years baking at 200oC.