论文标题
可变波长的快速扫描纳米X射线显微镜用于原位应变和倾斜映射
Variable-wavelength quick scanning nano-focused X-ray microscopy for in situ strain and tilt mapping
论文作者
论文摘要
在原位通过快速以纳米为中心的X射线扫描显微镜技术结合三维相互映射的快速X射线扫描显微镜技术，紧随其后的是微柱的压缩。与使用2个X射线纳米梁的其他尝试相比，它可以避免任何会导致样品破坏的运动或振动。该技术包括扫描以纳米为中心的X射线光束的能量和沿X射线梁沿焦点光学元件的平面翻译。在这里，我们通过对原位压缩过程中Si微柱及其基座的应变和晶格方向进行成像来证明这种方法。改变入射光束的能量，而不是摇动样品并绘制焦点光学元件，而不是移动样品可提供无振动的测量，而无需去除机械载荷。应变和晶格方向的地图与普通摇摆曲线扫描记录的图表非常吻合。可变波长快速扫描X射线显微镜为原位应变打开了途径，倾斜映射到更多样化和复杂的材料环境，尤其是在样品操作困难的情况下。
Compression of micro-pillars is followed in situ by a quick nano-focused X-ray scanning microscopy technique combined with three-dimensional reciprocal space mapping. Compared to other attempts using 2 X-ray nanobeams, it avoids any motion or vibration that would lead to a destruction of the sample. The technique consists of scanning both the energy of the incident nano-focused X-ray beam and the in-plane translations of the focusing optics along the X-ray beam. Here, we demonstrate the approach by imaging the strain and lattice orientation of Si micro-pillars and their pedestals during in situ compression. Varying the energy of the incident beam instead of rocking the sample and mapping the focusing optics instead of moving the sample supplies a vibration-free measurement of the reciprocal space maps without removal of the mechanical load. The maps of strain and lattice orientation are in good agreement with the ones recorded by ordinary rocking-curve scans. Variable-wavelength quick scanning X-ray microscopy opens the route for in situ strain and tilt mapping towards more diverse and complex materials environments, especially where sample manipulation is difficult.
