论文标题
基于Al-Alox-Al电容器的紧凑型超导微波谐振器
Compact superconducting microwave resonators based on Al-AlOx-Al capacitor
论文作者
论文摘要
我们通过基于铝制的替代制造方法 - 氧化铝-Aluminum（$ \ MATHRM {al/alo_x/al al} $），我们通过使用总元素谐振器来解决超导量子电路的扩展问题。谐振器的大小仅为0.04〜 $ \ MATHRM {mm^2} $，该订单比共面谐振器的典型尺寸小（1〜 $ \ MATHRM {mm^2} $）小。我们开发的制造方法很容易拟合到标准的超导码头制造过程中。我们已经获得了每个区域的电容14〜ff/$ \ MATHRM {μm^2} $和内部质量因子$ \ mathrm {1 \ times 10^3-8 \ 8 \ times 10^3} $在单次级别上。我们的结果表明，基于$ \ mathrm {al/alo_x/al} $电容器的此类设备可以进一步应用于Qubit读取方案，包括谐振器，过滤器，放大器，以及微波炉超材料和创新类型的Qubits，例如$0-π$ qubit。
We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum -- aluminum oxide -- aluminum ($\mathrm{Al/AlO_x/Al}$) parallel-plate capacitors. The size of the resonators is only 0.04~$\mathrm{mm^2}$, which is more than one order smaller than the typical size of coplanar resonators (1~$\mathrm{mm^2}$). The fabrication method we developed easily fits into the standard superconducting qubits fabrication process. We have obtained capacitance per area 14~fF/$\mathrm{μm^2}$ and the internal quality factor $\mathrm{1\times 10^3 - 8\times 10^3}$ at the single-photon level. Our results show that such devices based on $\mathrm{Al/AlO_x/Al}$ capacitors could be further applied to the qubit readout scheme, including resonators, filters, amplifiers, as well as microwave metamaterials and innovative types of qubits, such as $0-π$ qubit.
