论文标题

用于带电粒子跟踪的CMOS像素传感器的辐射硬度研究

Radiation hardness study on a CMOS pixel sensor for charged particle tracking

论文作者

Li, Long, Zhang, Liang, Dong, Jianing, Liu, Jian, Wang, Meng

论文摘要

CMOS像素传感器(称为supix-1)是为圆形电子峰孔子撞机(CEPC)项目的像素化硅跟踪器开发的。该传感器由九个扇区组成,其像素大小,二极管大小和几何形状都用180 nm CMOS图像传感器(CIS)工艺制成,以研究扩大像素的颗粒检测性能。 In this work, the radiation-induced effects on the charge collection of the sensor under the fluence of 1 $\times$ 10^13 1 MeV neq/cm^2 are studied by the measurements with the radioactive source of Fe-55 and the Technology Computer Aided Design (TCAD) simulations, since the radiation hardness of 6.8 $\times$ 10^12 1 MeV neq/cm^2 per year for Non-Ionizing Energy Loss (NIEL) effects 是必须的。在测量中,使用FE-55的K-$α$峰进行校准了传感器的增益。评估了像素等效噪声电荷(ENC),电荷收集效率(CCE)和信噪比(SNR)。通过自发重建算法研究了辐射引起的对簇特性的影响。在TCAD模拟中,为两个典型的撞击入射粒子造成的典型撞击粒子的收费收集$ 5 $ \ $ \ times $ 5像素矩阵。测量和仿真都表明,面积为21 $ $ m $ m $ \ times $ 84 $μ$ m的扩大像素,尽管传感器性能的损失比小像素损失更大,但仍具有令人满意的噪声和收集性能,用于在即将到来的Collider检测器中进行粒子跟踪后的辐照。

A CMOS pixel sensor, named Supix-1, is developed for a pixelated silicon tracker for the Circular Electron-Positron Collider (CEPC) project. The sensor, consisted of nine sectors varying in pixel sizes, diode sizes and geometries, is fabricated with a 180 nm CMOS Image Sensor (CIS) process to study the particle detection performance of enlarged pixels. In this work, the radiation-induced effects on the charge collection of the sensor under the fluence of 1 $\times$ 10^13 1 MeV neq/cm^2 are studied by the measurements with the radioactive source of Fe-55 and the Technology Computer Aided Design (TCAD) simulations, since the radiation hardness of 6.8 $\times$ 10^12 1 MeV neq/cm^2 per year for Non-Ionizing Energy Loss (NIEL) effects is required. In measurements, the sensor gain has been calibrated using the k-$α$ peak of Fe-55 before and after irradiation. The pixel-wise equivalent noise charge (ENC), charge collection efficiency (CCE) and signal-to-noise ratio (SNR) were evaluated. The radiation-induced effects on cluster properties are studied through a self-developed reconstruction algorithm. In TCAD simulations, charge collections in 5 $\times$ 5 pixel matrixes for two typical impinging cases of incident particles were simulated with and without irradiation. Both measurements and simulations indicate that enlarged pixels with area of 21 $μ$m $\times$ 84 $μ$m, though suffering greater loss on sensor performance than small pixels do, still have satisfactory noise and charge collection performance after irradiation for particle tracking in the upcoming collider detectors.

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