论文标题
超快速激光微调和纳米处理的结构光
Structured light for ultrafast laser micro- and nanoprocessing
论文作者
论文摘要
超短脉冲激光器的工业成熟度引发了许多物质加工策略的发展。最近，这些非凡的时间脉冲特性与先进的结构光概念的结合导致了新型激光应用方法的开发中的突破，这些方法现在将逐渐到达工业环境。我们回顾了从近红外向下到深紫外线的有效产生的定制焦点分布，例如，基于非裂开的光束和3D梁拆分器，并证明了它们对广泛材料的微加工和纳米机械的影响。在提出的光束塑造概念中，特别注意对高能量和高力量的适用性。
The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of novel laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions from the near infrared down to the deep ultraviolet, e.g., based on non-diffracting beams and 3D-beam splitters, and demonstrate their impact for micro- and nanomachining of a wide range of materials. In the beam shaping concepts presented, special attention was paid to suitability for both high energies and high powers.
