论文标题
没有底物的THZ焦平面超材料阵列具有高吸收比
Substrate-free THz focal plane metamaterial array with high absorption ratio
论文作者
论文摘要
带有光学读数的微电动机电系统（MEMS）焦平面阵列（FPA）为实时Terahertz（THZ）成像提供了令人兴奋的机会。但是，常规的FPA遭受了低THZ的吸收比，这进一步降低了THZ成像的性能。在这里，我们提出了一种简单且可扩展的方法，用于实现具有相对较高的吸收比的Thz焦平面超材料阵列。关键思想是将无基质结构的优势与超材料相结合。设计，制造和表征的100 X100 THZ FPA具有150 x150μm像素。研究了THZ吸收比对Sinx介电底物膜厚度的依赖性。制造的FPA在1.36 THz时表现出90.6％的谐振吸收，与理论模拟结果相当一致。我们的结果表明，这种无基质的THZ焦平面超材料阵列可以实现THZ成像。
Microelectromechanical system (MEMS) focal plane array (FPA) with optical readout offers exciting opportunities for real-time terahertz (THz) imaging. However, conventional FPA suffers from a low THz absorption ratio, which further decreases the performance of THz imaging. Here, we present a simple and scalable approach for the realization of THz focal plane metamaterial array with a relatively high absorption ratio. The key idea is to combine the advantages of substrate-free structures with metamaterial. A 100 x100 THz FPA with a 150 x 150 μm pixel is designed, fabricated, and characterized. The dependence of the THz absorption ratio on the thickness of SiNx dielectric substrate film is investigated. The fabricated FPA exhibits a 90.6% resonant absorption at 1.36 THz, agreeing considerably with the theoretical simulation results. Our results imply that such a substrate-free THz focal plane metamaterial array enables the realization of THz imaging.
