论文标题
高频电容放电的增强工作状态
An enhanced operating regime for high frequency capacitive discharges
论文作者
论文摘要
我们报告了在存在与电极平行的弱磁场的情况下，存在高频，低压电容耦合等离子体（CCP）排放的增强工作状态。我们的PIC-MCC模拟表明，当电子回旋频率等于所施加的RF频率的一半时，血浆密度和离子通量值显示出鲜明的峰。负责此行为的物理机制可追溯到电极鞘边缘的振荡运动与该鞘反射的一组电子的运动之间的同步。这些电子获得大量能量，导致较高的电离导致离子通量峰值。我们的理论发现应该在当今的CCP设备中易于实验验证，并可以提供有用的指南，以增强CCP设备在工业应用中的运行性能。
We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field applied parallel to the electrodes. Our PIC-MCC simulations show that the plasma density and ion flux values exhibit a sharp peak when the electron cyclotron frequency equals half of the applied RF frequency. The physical mechanism responsible for this behaviour is traced to a synchronization between the oscillatory motion of the electrode sheath edge and the motion of a set of electrons reflected by this sheath. These electrons gain a substantial amount of energy that causes a concomitant higher ionisation leading to a peak in the ion flux. Our theoretical findings should be easy to verify experimentally in present day CCP devices and could provide useful guidelines for enhancing the operational performance of CCP devices in industrial applications.
