论文标题
粒子从暴露于等离子体和电子束的底物上倾斜
Particle lofting from substrate exposed to plasma and electron beam
论文作者
论文摘要
位于介电底物上的纳米尺寸的介电粒子暴露于冷等离子体中的低能电子，离子和电子通量的通量，以及通过粒子中的粒子模拟来研究粒子lofting lofting lofting现象的这两个源的结合。结果令人感兴趣，在半导体行业，月球勘探和灰尘悬浮的解释中降低灰尘。
A nanometer-sized dielectric particle lying on a dielectric substrate is exposed to the flux of low-energy electrons, ion and electron fluxes from a cold plasma and the fluxes from the combination of these two sources with the help of particle-in-cell simulation to investigate the particle lofting phenomenon. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration, and the explanation of the dust levitation.
