论文标题

绝缘子上硅的表面声波光子器件

Surface acoustic wave photonic devices in silicon on insulator

论文作者

Munk, Dvir, Katzman, Moshe, Hen, Mirit, Priel, Maayan, Feldberg, Moshe, Sharabani, Tali, Levy, Shahar, Bergman, Arik, Zadok, Avi

论文摘要

平面光子综合电路中的光学机械相互作用对基础研究和应用引起了极大的兴趣。但是,在技术上最重要的光子学平台中实际上没有光学机械:绝缘体上的硅。先前的示范需要硅结构的蚀刻和悬浮液。在这里,我们在绝缘子上呈现硅中的表面声波光(最多8 GHz频率)。通过在金属光栅和热弹性膨胀中吸收调制泵光来发射表面波。通过标准赛车谐振器中光探针的光弹性调制来检测表面波。设备不涉及压电电致致动,波导的悬架或杂交材料整合。片上显示了入射微波信号和声学真实时间延迟的波长转换。最后,使用声学延迟实现了最多六个水龙头和20个MHz宽的通带的离散时间微波滤波器。该概念适用于集成的微波 - 光子学信号处理

Opto-mechanical interactions in planar photonic integrated circuits draw great interest in basic research and applications. However, opto-mechanics is practically absent in the most technologically significant photonics platform: silicon on insulator. Previous demonstrations required the under-etching and suspension of silicon structures. Here we present surface acoustic wave-photonic devices in silicon on insulator, up to 8 GHz frequency. Surface waves are launched through absorption of modulated pump light in metallic gratings and thermoelastic expansion. The surface waves are detected through photo-elastic modulation of an optical probe in standard race-track resonators. Devices do not involve piezo-electric actuation, suspension of waveguides or hybrid material integration. Wavelength conversion of incident microwave signals and acoustic true time delays up to 40 ns are demonstrated on-chip. Lastly, discrete-time microwave-photonic filters with up to six taps and 20 MHz wide passbands are realized using acoustic delays. The concept is suitable for integrated microwave-photonics signal processing

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