论文标题
准晶体Ti-Zr-Ni膜的横向生长微观结构
Transversal growth microstructures of quasicrystalline Ti-Zr-Ni films
论文作者
论文摘要
ND：YAG激光器的脉冲激光沉积用于生产玻璃基板上数百种纳米厚的ic准晶Ti-Zr-ni膜。研究了沉积温度TS对膜层膜层的结构，形态和微观结构的影响。通过X射线衍射和透射电子显微镜技术评估形态和显微结构特征。发现低沉积温度可产生嵌入无定形基质中的纳米大小的晶粒。谷物表现出准晶体。较高的沉积温度导致膜的结构在整个生长方向上都不均匀。与底物接触的层是非常薄的无定形层。电影的主要部分由结晶的柱组成。这些圆柱是从纳米结晶层生长的，在纳米结晶层中，水晶的大小随厚度的增加而增加。
Pulsed laser deposition from a Nd:YAG laser was employed in production of hundreds of nanometer thick quasicrystalline Ti-Zr-Ni films on glass substrate. The influence of deposition temperature Ts on the structure, morphology and microstructure of the films across their thickness was investigated. The morphology and microstructure features were evaluated by X-ray diffraction and transmission electron microscopy techniques. The low deposition temperatures were found to produce films with nanometer sized grains embedded in an amorphous matrix. The grains exhibit quasicrystalline order. The higher deposition temperatures lead to films whose structure is not uniform all along the growth direction. The layer in contact with the substrate is a very thin amorphous layer. The main part of the film consists of crystallized columns. The columns have grown from a nano-crystallized layer where the size of crystallites increases with increasing thickness.
