论文标题
通过使用碰撞辐射模型在电容耦合AR等离子体II中诊断电子密度和温度：二维分布
Diagnosis of electron density and temperature by using collisional radiative model in capacitively coupled Ar plasmas II: two-dimensional distributions
论文作者
论文摘要
射频功率和驱动频率对电子密度和温度的二维（轴向和径向）分布的影响，在低压电容性耦合的氩等离子中进行了实验研究。通过采用空间分辨的诊断系统，检测到696.5 nm和750.4 nm发射线的强度曲线，该系统由电荷耦合器件（CCD）和带通干扰过滤器组成。电子密度和电子温度的二维分布是通过碰撞辐射模型（CRM）从发射强度的空间分布计算的。发现电子密度的轴向和径向分布在较低的RF功率下更均匀。在较低的驱动频率下，电子密度的轴向均匀性更好，而电子温度的径向轮廓在较高的激发频率下会更平坦。在所有情况下，电子温度在整体等离子体中非常均匀。此外，通过在13.56 MHz下输入RF功率的增加观察到从α到γ模式的模式过渡，这会导致电子密度显着增加，并且电子温度突然降低。
Effects of radio-frequency power and driven frequency on the two-dimensional (axial and radial) distributions of electron density and temperature were experimentally investigated in low pressure capacitively coupled argon plasmas. The intensity profiles of 696.5 nm and 750.4 nm emission lines were detected by employing a spatially resolved diagnostic system, which consists of a charge coupled device (CCD) and bandpass interference filters. The two-dimensional distributions of electron density and electron temperature were calculated from the spatial distributions of emission intensities via a collisional radiative model (CRM). It is found that the axial and radial distributions of electron density are more uniform at a lower RF power. The axial uniformity of electron density is better at a lower driven frequency, while the radial profiles of electron temperature is flatter at a higher excitation frequency. In all the cases, the electron temperature is extremely uniform in the bulk plasma. Moreover, a mode transition from the α to the γ mode is observed with the increase of input RF power at 13.56 MHz, which causes a significant increase of electron density and an abrupt decrease of electron temperature.
