论文标题

氧化物薄膜中材料转化的光学识别

Optical Identification of Materials Transformations in Oxide Thin Films

论文作者

Sutherland, Duncan R., Connolly, Aine Boyer, Amsler, Maximilian, Chang, Ming-Chiang, Gann, Katie Rose, Gupta, Vidit, Ament, Sebastian, Guevarra, Dan, Gregoire, John M., Gomes, Carla P., van Dover, R. B., Thompson, Michael O.

论文摘要

组合研究的高通量实验的最新进展已加速了各种组成和合成条件的材料的发现和分析。但是,许多更强大的表征方法受速度,成本,可用性和/或分辨率的限制。为了有效利用这些方法,开发方法是有价值的,用于识别用于使用高精度技术的随访特征的关键组成和条件,例如基于微米级同步基因的X射线衍射(XRD)。在这里,我们证明了光学显微镜和反射率光谱的使用来识别薄膜文库中可能的相变边界。这些方法用于描绘氧化物材料的侧向梯度激光尖峰退火(LG-LSA)后可能的亚稳态相边界。然后将一组边界与使用高分辨率XRD获得的结构转换的确定确定。我们证明了光学方法检测组成梯度LA-MN-O库中的95%以上的结构转换和GA $ _2 $ o $ $ _3 $样本,这两种样本都需要大量的LG-LSA退火。我们的结果为光学检测转换作为先验数据的价值提供了定量支持,以指导后续的结构表征,最终加速并增强了$ $ $ M分辨率XRD实验的有效实现。

Recent advances in high-throughput experimentation for combinatorial studies have accelerated the discovery and analysis of materials across a wide range of compositions and synthesis conditions. However, many of the more powerful characterization methods are limited by speed, cost, availability, and/or resolution. To make efficient use of these methods, there is value in developing approaches for identifying critical compositions and conditions to be used as a-priori knowledge for follow-up characterization with high-precision techniques, such as micron-scale synchrotron based X-ray diffraction (XRD). Here we demonstrate the use of optical microscopy and reflectance spectroscopy to identify likely phase-change boundaries in thin film libraries. These methods are used to delineate possible metastable phase boundaries following lateral-gradient Laser Spike Annealing (lg-LSA) of oxide materials. The set of boundaries are then compared with definitive determinations of structural transformations obtained using high-resolution XRD. We demonstrate that the optical methods detect more than 95% of the structural transformations in a composition-gradient La-Mn-O library and a Ga$_2$O$_3$ sample, both subject to an extensive set of lg-LSA anneals. Our results provide quantitative support for the value of optically-detected transformations as a priori data to guide subsequent structural characterization, ultimately accelerating and enhancing the efficient implementation of $μ$m-resolution XRD experiments.

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