论文标题

飞秒激光诱导的聚酰亚胺薄膜中通过非线性吸收的纳米级水泡

Femtosecond-laser-induced nanoscale blisters in polyimide thin films through nonlinear absorption

论文作者

Godfrey, A. T. K., Kallepalli, L. N. D., Ratté, J. J., Zhang, C., Corkum, P. B.

论文摘要

飞秒激光脉冲的非线性吸收为将任何培养基中的能量沉积局限于脉冲焦点直径以下的区域提供了独特的机会。通过透明的高带隙材料(如玻璃)对聚合物膜进行照明,然后在聚合物中非线性吸收800 nm的光,使我们能够将吸收进一步限制在沿着传播方向的非常薄的层。我们通过通过线性,两光子和三光子的吸收来模拟飞秒激光诱导的聚合物修饰来证明这种限制,并讨论多光过程提供的聚合物中对能量吸收的控制。沉积在薄聚合物膜后面的能量会诱导突出的水泡。我们提出了泡沫直径和脉冲能量尺度的实验结果。使用0.95 Na聚焦,我们在单微米尺度下和低于单微米尺度上可能可以获得直径至700 nm的激光诱导的水泡,表明基于水泡的激光诱导的正向转移。使用飞秒激光器使用飞秒激光器的亚微米水泡形成还提供了一种新型的方法,可直接,精确,精确地对具有单激光脉冲的膜上的微观结构。该方法是光刻,激光铣削和基于激光的添加剂加工的可能替代方法,它使表面组成不变。

Nonlinear absorption of femtosecond laser pulses provides a unique opportunity to confine energy deposition in any medium to a region that is below the focal diameter of a pulse. Illumination of a polymer film through a transparent high bandgap material such as glass, followed by nonlinear absorption of 800 nm light in polymers, allows us to further restrict absorption to a very thin layer along the propagation direction. We demonstrate this confinement by simulating femtosecond-laser-induced polymer modification by linear, two-photon and three-photon absorption, and discuss the control over energy absorption in polymers that multiphoton processes offer. Energy deposited behind a thin polymer film induces a protruding blister. We present experimental results of blister diameter and height scaling with pulse energy. Using 0.95 NA focussing, we obtained laser-induced blisters with diameters as small as 700 nm suggesting blister-based Laser-Induced Forward Transfer is possible on and below the single-micron scale. Sub-micrometer blister formation using femtosecond lasers also offers a novel method of direct, precise laser-writing of microstructures on films with single laser pulses. This method is a possible alternative to lithography, laser milling, and laser-based additive machining which leaves the surface composition unchanged.

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