论文标题

si $ _x $ ge $ _ {1-x} $纳米线

Reversible Al Propagation in Si$_x$Ge$_{1-x}$ Nanowires

论文作者

Luong, Minh Anh, Eric, Robin, Nicolas, Pauc, Pascal, Gentile, Thierry, Baron, Bassem, Salem, Masiar, Sistani, Alois, Lugstein, Maria, Spies, Bruno, Fernandez, Hertog, M. den

论文摘要

尽管可逆性是热力学中的一个基本概念,但大多数反应并不容易可逆,尤其是在固态物理学中。例如,热扩散是一个众所周知的概念,在其他概念中用于将掺杂原子注入矩阵中的替代位置并改善设备性能。通常,这种扩散过程将产生浓度梯度在越来越大的区域延伸,而无需扭转这种影响。另一方面,虽然半导体纳米线的自下而上的生长很有趣,但仍然很难制造具有高控制的轴向异质结构。在本文中,我们报告了Al Metal Pad与Si $ _x $ ge $ _ {1-x} $合金纳米线之间的固态交换反应中发生的可逆热扩散过程。热辅助反应导致建立一个富含Si的区域,该区域夹在反应的Al和未反应的SIXGE1-X部分之间,形成了轴向Al/si/si $ _x $ ge $ ge $ _ {1-x} $ heterostructure。加热或(缓慢冷却),Al金属可以重复进出Si $ _x $ ge $ _ {1-x} $合金纳米线,同时保持类似杆状的几何形状和结晶度,从而在单个流程中以可逆的方式与当前的SI-CORPART SIE TEBLECT SI TECTECTION构建和联系纳米线异构结构。对于各种应用程序,这个有趣的系统是有希望的,例如具有集成联系人的所有结晶系统中的相变记忆,以及用于近乎交汇的传感应用程序的Si/Si $ _x $ ge $ _ {1-x} $/SI异源结构。

While reversibility is a fundamental concept in thermodynamics, most reactions are not readily reversible, especially in solid state physics. For example, thermal diffusion is a widely known concept, used among others to inject dopant atoms into the substitutional positions in the matrix and improve the device properties. Typically, such a diffusion process will create a concentration gradient extending over increasingly large regions, without possibility to reverse this effect. On the other hand, while the bottom up growth of semiconducting nanowires is interesting, it can still be difficult to fabricate axial heterostructures with high control. In this paper, we report a reversible thermal diffusion process occurring in the solid-state exchange reaction between an Al metal pad and a Si$_x$Ge$_{1-x}$ alloy nanowire observed by in-situ transmission electron microscopy. The thermally assisted reaction results in the creation of a Si-rich region sandwiched between the reacted Al and unreacted SixGe1-x part, forming an axial Al/Si/Si$_x$Ge$_{1-x}$ heterostructure. Upon heating or (slow) cooling, the Al metal can repeatably move in and out of the Si$_x$Ge$_{1-x}$ alloy nanowire while maintaining the rod-like geometry and crystallinity, allowing to fabricate and contact nanowire heterostructures in a reversible way in a single process step, compatible with current Si based technology. This interesting system is promising for various applications, such as phase change memories in an all crystalline system with integrated contacts, as well as Si/Si$_x$Ge$_{1-x}$/Si heterostructures for near-infrared sensing applications.

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